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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11422477 B1

PDFFull Text
Date of Patent:
Aug. 23, 2022

Filed:

Apr. 23, 2019

Vibration isolation system and lithographic apparatus

Applicant:

Asml Netherlands B.v., Veldhoven, NL;

Inventors:

Roy Hendrikus Emilie Maria Jacobs, Eindhoven, NL;

Cornelius Adrianus Lambertus De Hoon, Eindhoven, NL;

Jeroen Pieter Starreveld, Knegsel, NL;

Johannes Petrus Martinus Bernardus Vermeulen, Leende, NL;

Assignee:

ASML Netherlands B.V., Veldhoven, NL;

Attorney:

Sterne, Kessler, Goldstein & Fox P.L.L.C.

Primary Examiner:

Hung V Nguyen

Int. Cl.
CPC ...
G03F 7/20 (2006.01); F16F 13/00 (2006.01); F16F 15/023 (2006.01); F16F 15/04 (2006.01);
U.S. Cl.
CPC ...
G03F 7/709 (2013.01); F16F 13/002 (2013.01); F16F 15/0232 (2013.01); F16F 15/046 (2013.01); G03F 7/7085 (2013.01); F16F 2222/126 (2013.01); F16F 2228/063 (2013.01); F16F 2230/0005 (2013.01); F16F 2232/08 (2013.01); F16F 2238/022 (2013.01);
Abstract

The invention provides a vibration isolation system (IS), comprising a piston () to carry a payload, a connecting member (), a spring () and a flexible member (). The spring is arranged to support the piston along a direction with a positive stiffness. The flexible member is arranged to apply a force to the piston along the direction via the connecting member with a negative stiffness.

Find Patent Forward Citations

Jacobs, Roy Hendrikus Emilie Maria. (2022). Vibration isolation system and lithographic apparatus (U.S. Patent No. 11422477). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11422477

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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