The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 23, 2022
Filed:
Oct. 08, 2019
Tokyo Electron Limited, Tokyo, JP;
Takeshi Kobayashi, Iwate, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
A rotation angle detection apparatus includes a movable pattern prepared on an outer peripheral side surface of a rotary shaft and having a shape that changes along a circumferential direction of the outer peripheral side surface; and a stationary pattern fixedly arranged around the rotary shaft so as to face the movable pattern. An overlapping state between the movable pattern and the stationary pattern changes by rotation of the rotary shaft. A physical quantity changing according to a change in the overlapping state between the movable pattern and the stationary pattern is detected, and a rotation angle of the rotary shaft is detected based on the physical quantity.