The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 23, 2022
Filed:
Mar. 11, 2021
Applicant:
Fujimi Incorporated, Aichi, JP;
Inventor:
Takahiro Umeda, Aichi, JP;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C09G 1/02 (2006.01); H01L 21/321 (2006.01);
U.S. Cl.
CPC ...
C09G 1/02 (2013.01); H01L 21/3212 (2013.01);
Abstract
To provide a novel polishing composition capable of improving the polishing speed of metal (particularly, tungsten) and maintaining stability as a composition. A polishing composition contains abrasive grains; quaternary amine having at least one alkyl group having 2 or more carbon atoms or a salt thereof; and a liquid carrier, wherein a pH of the polishing composition is from 2 to 5, and a zeta potential of the abrasive grains in the polishing composition is adjusted to 15 mV or more and less than 40 mV over the entire range of pH 2 to pH 4.