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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11415889 B1

PDFFull Text
Date of Patent:
Aug. 16, 2022

Filed:

Jun. 19, 2019

Chemical supply structure and a developing apparatus having the same

Applicant:

Samsung Electronics Co., Ltd., Suwon-si, KR;

Inventors:

Jong-Keun Oh, Seoul, KR;

Kyoung-Noh Kim, Hwaseong-si, KR;

Man-Kyu Kang, Suwon-si, KR;

Byung-Gook Kim, Seoul, KR;

Assignee:

Samsung Electronics Co., Ltd., Suwon-si, KR;

Attorney:

Lee IP Law, P.C.

Primary Examiner:

Sophia S Chen

Int. Cl.
CPC ...
G03G 15/10 (2006.01); G03F 7/30 (2006.01); B05B 1/00 (2006.01); B05C 5/00 (2006.01); H01L 21/67 (2006.01); B41J 2/16 (2006.01); G03F 7/20 (2006.01); G03F 7/00 (2006.01); G03F 7/32 (2006.01); B05B 1/28 (2006.01); B05C 5/02 (2006.01); B05C 11/10 (2006.01); H01L 21/687 (2006.01);
U.S. Cl.
CPC ...
G03F 7/2043 (2013.01); B05B 1/28 (2013.01); B05C 5/02 (2013.01); B05C 11/10 (2013.01); B41J 2/1606 (2013.01); G03F 7/0035 (2013.01); G03F 7/20 (2013.01); G03F 7/3021 (2013.01); G03F 7/32 (2013.01); G03G 15/10 (2013.01); H01L 21/6708 (2013.01); H01L 21/67051 (2013.01); H01L 21/68764 (2013.01);
Abstract

A chemical supply structure includes a bar-shaped body having a plurality of chemical reservoirs in which a plurality of chemicals is individually stored such that the body partially crosses an underlying substrate, a bar-shaped nozzle protruded from a bottom surface of the body and injecting injection chemicals onto the substrate, a plurality of the chemicals being mixed into the injection chemicals, and a hydrophobic unit arranged on the bottom surface of the body and on a side surface of the nozzle such that a mixed solution mixed with the injection chemicals is prevented from adhering to the bottom surface and the side surface by controlling a contact angle of the mixed solution with respect to the bottom surface and the side surface.

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