The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 16, 2022
Filed:
Jul. 16, 2019
Applicant:
Asml Netherlands B.v., Veldhoven, NL;
Inventors:
Sander Frederik Wuister, Eindhoven, NL;
Oktay Yildirim, Eindhoven, NL;
Gijsbert Rispens, Eersel, NL;
Alexey Olegovich Polyakov, Veldhoven, NL;
Assignee:
ASML Netherlands B.V., Veldhoven, NL;
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/004 (2006.01); G03F 7/039 (2006.01); G03F 7/20 (2006.01); G03F 7/16 (2006.01); G03F 7/30 (2006.01); G03F 7/00 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0045 (2013.01); G03F 7/0002 (2013.01); G03F 7/0043 (2013.01); G03F 7/0047 (2013.01); G03F 7/039 (2013.01); G03F 7/16 (2013.01); G03F 7/20 (2013.01); G03F 7/2004 (2013.01); G03F 7/2041 (2013.01); G03F 7/30 (2013.01);
Abstract
A resist composition is disclosed which comprises a perovskite material with a structure having a chemical formula selected from ABX, ABX, or ABX, wherein A is a compound containing an NHgroup, B is a metal and X is a halide constituent. The perovskite material may comprise one or more of the following components: halogen-mixed perovskite material; metal-mixed perovskite material, and organic ligand mixed perovskite material.