The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 16, 2022
Filed:
Jun. 19, 2019
Applicant:
Tokyo Electron Limited, Tokyo, JP;
Inventors:
Junichi Takei, Yamanashi, JP;
Hiroshi Sone, Tokyo, JP;
Naoyuki Suzuki, Tokyo, JP;
Shinji Orimoto, Yamanashi, JP;
Assignee:
TOKYO ELECTRON LIMITED, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/34 (2006.01); C23C 14/35 (2006.01); C23C 14/54 (2006.01); H01L 21/203 (2006.01);
U.S. Cl.
CPC ...
C23C 14/352 (2013.01); C23C 14/54 (2013.01); H01J 37/3408 (2013.01); H01J 37/3414 (2013.01); H01J 37/3447 (2013.01); H01L 21/203 (2013.01);
Abstract
A sputtering device includes a processing chamber where a substrate is accommodated, and a slit plate that partitions the processing chamber into a first space where a target member is disposed and a second space where the substrate is disposed. The slit plate includes an inner member having an opening that penetrates therethrough in a thickness direction of the slit plate, and an outer member disposed around the inner member. The inner member is attachable to and detachable from the outer member.