The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 16, 2022
Filed:
May. 01, 2020
Applied Materials, Inc., Santa Clara, CA (US);
Alexander N. Lerner, San Jose, CA (US);
Roey Shaviv, Palo Alto, CA (US);
Michael P. Karazim, San Jose, CA (US);
Kevin Vincent Moraes, Mountain View, CA (US);
Steven V. Sansoni, Livermore, CA (US);
Andrew J. Constant, Cupertino, CA (US);
Jeffrey Allen Brodine, Los Gatos, CA (US);
Kim Ramkumar Vellore, San Jose, CA (US);
Amikam Sade, Cupertino, CA (US);
Niranjan Kumar, Santa Clara, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Embodiments of the present disclosure generally relate to a processing system for forming one or more layers of a photodiode. In one embodiment, the processing system includes a transfer chamber, a plurality of processing chambers, and a controller configured to cause a process to be performed in the processing system. The process includes performing a pre-clean process on a substrate, aligning and placing a first mask on the substrate, depositing a first layer on the substrate, and depositing a second layer on the substrate. The processing system can form layers of a photodiode in a low defect, cost effective, and high utilization manner.