The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 16, 2022
Filed:
Dec. 27, 2018
Applicant:
Hansol Chemical Co., Ltd., Seoul, KR;
Inventors:
Jung-Woo Park, Seoul, KR;
Jang-Hyeon Seok, Sejong-si, KR;
Hyo-Suk Kim, Jeollabuk-do, KR;
Eun-Jeong Cho, Gwangju, KR;
Assignee:
HANSOL CHEMICAL CO., LTD., Seoul, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C07F 5/00 (2006.01); C23C 16/18 (2006.01);
U.S. Cl.
CPC ...
C07F 5/003 (2013.01); C23C 16/18 (2013.01);
Abstract
The present invention relates to a compound that is capable of being used in thin-film deposition using vapor deposition. Particularly, the present invention relates to a rare earth compound, which is capable of being applied to atomic layer deposition (ALD) or chemical vapor deposition (CVD) and which has excellent thermal stability and reactivity, a rare earth precursor including the same, a method of manufacturing the same, and a method of forming a thin film using the same.