The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 09, 2022

Filed:

Oct. 12, 2020
Applicant:

Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu, TW;

Inventors:

Yi-Chuan Lin, Hsinchu, TW;

Chiang-Ming Chuang, Changhua, TW;

Shang-Yen Wu, Tainan, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/66 (2006.01); H01L 29/417 (2006.01); H01L 29/49 (2006.01); H01L 21/762 (2006.01); H01L 21/02 (2006.01); H01L 21/3105 (2006.01); H01L 27/11546 (2017.01); H01L 29/423 (2006.01); H01L 21/321 (2006.01);
U.S. Cl.
CPC ...
H01L 29/66545 (2013.01); H01L 21/02381 (2013.01); H01L 21/02532 (2013.01); H01L 21/02639 (2013.01); H01L 21/31055 (2013.01); H01L 21/76294 (2013.01); H01L 27/11546 (2013.01); H01L 29/41783 (2013.01); H01L 29/42328 (2013.01); H01L 29/495 (2013.01); H01L 29/6653 (2013.01); H01L 21/3212 (2013.01);
Abstract

Provided is a semiconductor device including a substrate, a plurality of memory cells, and at least one dummy gate structure. The substrate has a memory cell region and a dummy region. The memory cells are disposed on the substrate in the memory cell region. Each memory cell includes: adjacent two stack structures disposed on the substrate; two select gates respectively disposed outside the adjacent two stack structures; and an erase gate disposed between the adjacent two stack structures. The erase gate has a step between a topmost top surface and a lowermost top surface of the erase gate. The at least one dummy gate structure is disposed on the substrate in the dummy region.


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