The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 09, 2022

Filed:

May. 06, 2020
Applicant:

Qualcomm Incorporated, San Diego, CA (US);

Inventors:

Junjing Bao, San Diego, CA (US);

Ye Lu, San Diego, CA (US);

Peijie Feng, San Diego, CA (US);

Chenjie Tang, San Diego, CA (US);

Assignee:

Other;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/06 (2006.01); H01L 29/66 (2006.01); H01L 29/78 (2006.01); H01L 29/786 (2006.01); H01L 29/49 (2006.01); H01L 27/092 (2006.01); H01L 29/423 (2006.01); H01L 21/02 (2006.01); H01L 21/764 (2006.01);
U.S. Cl.
CPC ...
H01L 29/4908 (2013.01); H01L 21/02532 (2013.01); H01L 21/02603 (2013.01); H01L 21/764 (2013.01); H01L 27/092 (2013.01); H01L 29/0673 (2013.01); H01L 29/42392 (2013.01); H01L 29/4991 (2013.01); H01L 29/66545 (2013.01); H01L 29/66553 (2013.01); H01L 29/66742 (2013.01); H01L 29/78618 (2013.01); H01L 29/78696 (2013.01);
Abstract

An integrated device that includes a substrate and a first transistor formed over the substrate. The first transistor includes a first source disposed over the substrate, a first drain disposed over the substrate, a first plurality of channels coupled to the first source and the first drain, where the first plurality of channels is located between the first source and the first drain; at least one inner spacer located between two adjacent channels from the first plurality of channels; at least two voids located between the two adjacent channels; and a first gate surrounding the first plurality of channels.


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