The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 09, 2022

Filed:

Jan. 31, 2020
Applicant:

Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu, TW;

Inventors:

Harry Hak-Lay Chuang, Singapore, SG;

Wei Cheng Wu, Zhubei, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/088 (2006.01); H01L 21/8234 (2006.01); H01L 29/78 (2006.01); H01L 29/161 (2006.01); H01L 29/16 (2006.01); H01L 21/265 (2006.01); H01L 21/266 (2006.01); H01L 29/66 (2006.01); H01L 21/02 (2006.01); H01L 29/165 (2006.01); H01L 27/092 (2006.01); H01L 29/51 (2006.01);
U.S. Cl.
CPC ...
H01L 27/088 (2013.01); H01L 21/02529 (2013.01); H01L 21/02532 (2013.01); H01L 21/266 (2013.01); H01L 21/2652 (2013.01); H01L 21/26513 (2013.01); H01L 21/823412 (2013.01); H01L 21/823418 (2013.01); H01L 21/823462 (2013.01); H01L 27/0922 (2013.01); H01L 29/161 (2013.01); H01L 29/165 (2013.01); H01L 29/1608 (2013.01); H01L 29/66636 (2013.01); H01L 29/7848 (2013.01); H01L 29/51 (2013.01); H01L 29/78 (2013.01);
Abstract

A method of fabricating a semiconductor device includes forming first gate structure and a second gate structure over a core device region of a substrate. The method further includes forming stressors at opposite sides of the first gate structure. The method further includes doping the stressors to form a first source region and a first drain region of a first device. The method further includes doping into the substrate and at opposite sides of the second gate structure to form a second source region and a second drain region of a second device, wherein the first source region, the first drain region, the second source region and the second drain region are of a same conductivity, and the first source region comprises a different material from the second source region.


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