The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 09, 2022
Filed:
Apr. 14, 2021
Applicant:
Gigaphoton Inc., Tochigi, JP;
Inventors:
Yoshiyuki Honda, Oyama, JP;
Masayuki Morita, Oyama, JP;
Assignee:
Gigaphoton Inc., Tochigi, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G21K 1/06 (2006.01); H05G 2/00 (2006.01); G03F 7/20 (2006.01);
U.S. Cl.
CPC ...
G21K 1/062 (2013.01); G03F 7/70033 (2013.01); G03F 7/70316 (2013.01); H05G 2/005 (2013.01); H05G 2/008 (2013.01);
Abstract
An extreme ultraviolet light concentrating mirror may include a substrate, a multilayer reflection film provided on the substrate and configured to reflect extreme ultraviolet light, and a protective film provided on the multilayer reflection film. Here, the protective film may include a mixed film in which a network-forming oxide is mixed with an amorphous titanium oxide, or a mixed film in which two or more amorphous titanium oxide layers and two or more network-forming oxide layers are each alternately laminated.