The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 09, 2022
Filed:
Mar. 23, 2017
American Air Liquide, Inc., Fremont, CA (US);
L'air Liquide, Société Anonyme Pour L'etude ET L'exploitation Des Procédés Georges Claude, Paris, FR;
Manish Khandelwal, Somerset, NJ (US);
Sean Kerrigan, Princeton, NJ (US);
Jean-marc Girard, Versailles, FR;
Antonio Sanchez, Tsukuba, JP;
Peng Zhang, Montvale, NJ (US);
Yang Wang, Garnet Valley, PA (US);
Manish Khandelwal, Somerset, NJ (US);
Sean Kerrigan, Princeton, NJ (US);
Jean-Marc Girard, Versailles, FR;
Antonio Sanchez, Tsukuba, JP;
Peng Zhang, Montvale, NJ (US);
Yang Wang, Garnet Valley, PA (US);
L'Air Liquide, Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude, Paris, FR;
American Air Liquide, Inc., Fremont, CA (US);
Abstract
Si-containing film forming compositions are disclosed comprising a precursor having the formula [—NR—RRSi—(CH)—SiRR—]wherein n=2 to 400; R, R, R, R, and Rare independently H, a hydrocarbon group, or an alkylamino group, and provided that at least one of R, R, R, and Ris H; and R is independently H, a hydrocarbon group, or a silyl group. Exemplary pre-cursors include, but are not limited to, [—NH—SiH—CH—SiH—], and [—N(SiH—CH—SiH)—SiH—CH—SiH—].