The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 02, 2022
Filed:
Apr. 05, 2019
Applicant:
Mks Instruments, Inc., Andover, MA (US);
Inventors:
Junhua Ding, Boxborough, MA (US);
Michael L'Bassi, Sterling, MA (US);
Assignee:
MKS Instruments, Inc., Andover, MA (US);
Primary Examiner:
Int. Cl.
CPC ...
G05B 15/02 (2006.01); H01L 21/67 (2006.01); G05D 7/06 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67017 (2013.01); G05B 15/02 (2013.01); G05D 7/0647 (2013.01);
Abstract
In a pulse gas delivery system, a chamber is pre-charged to a prescribed pressure through an upstream valve. Thereafter, a downstream control valve is opened to control flow of the gas during a gas pulse. A dedicated controller may control the downstream control valve in a feedback loop during the pulse based on pressure and temperature detected during the pulse.