The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 02, 2022
Filed:
Sep. 25, 2020
Applicant:
Jeol Ltd., Tokyo, JP;
Inventor:
Tatsuya Uchida, Tokyo, JP;
Assignee:
JEOL Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/05 (2006.01); H01J 49/06 (2006.01); H01J 49/44 (2006.01); H01J 37/12 (2006.01); H01J 37/153 (2006.01);
U.S. Cl.
CPC ...
H01J 49/068 (2013.01); H01J 37/05 (2013.01); H01J 37/12 (2013.01); H01J 37/153 (2013.01); H01J 49/44 (2013.01); H01J 2237/05 (2013.01); H01J 2237/153 (2013.01);
Abstract
An input lens is provided which has a large acceptance solid angle for electrons. The input lens is for use in an electron spectrometer and disposed between an electron source producing electrons and an electron analyzer in the electron spectrometer. The input lens has a reference electrode at a reference potential, a slit, first through nth electrodes, where n is an integer equal to or greater than three, arranged between the reference electrode and the slit, and a second mesh attached to the first electrode. The first through nth electrodes are arranged in this order along an optical axis. The second mesh is at a potential higher than the reference potential.