The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 02, 2022

Filed:

Nov. 24, 2020
Applicant:

Mochii, Inc., Seattle, WA (US);

Inventors:

Christopher Su-Yan Own, Seattle, WA (US);

Matthew Francis Murfitt, Seattle, WA (US);

Assignee:

Mochii, Inc., Seattle, WA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/28 (2006.01); H01J 37/20 (2006.01); H01J 37/22 (2006.01); C23C 14/24 (2006.01); C23C 14/52 (2006.01); C23C 14/54 (2006.01); H01J 37/10 (2006.01); H01J 37/18 (2006.01); H01J 37/244 (2006.01); H01J 37/147 (2006.01); G02B 21/00 (2006.01); G02B 21/36 (2006.01);
U.S. Cl.
CPC ...
H01J 37/28 (2013.01); C23C 14/24 (2013.01); C23C 14/52 (2013.01); C23C 14/54 (2013.01); H01J 37/10 (2013.01); H01J 37/1471 (2013.01); H01J 37/18 (2013.01); H01J 37/20 (2013.01); H01J 37/222 (2013.01); H01J 37/228 (2013.01); H01J 37/244 (2013.01); G02B 21/008 (2013.01); G02B 21/0048 (2013.01); G02B 21/367 (2013.01); H01J 2237/0203 (2013.01); H01J 2237/2007 (2013.01); H01J 2237/28 (2013.01);
Abstract

A charged-particle beam microscope is provided for imaging a sample. The microscope has a vacuum chamber to maintain a low-pressure environment. A motorized stage is provided to hold and move a sample in the vacuum chamber. A charged-particle beam source generates a charged-particle beam. Charged-particle beam optics converge the charged-particle beam onto the sample. A detector is provided to detect charged-particle radiation emanating from the sample. A controller analyzes the detected charged-particle radiation to generate an image of the sample. A power supply powers at least the charged-particle beam optics and the controller. The charged-particle beam microscope weighs less than about 50 kg.


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