The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 02, 2022

Filed:

Jul. 21, 2020
Applicant:

Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu, TW;

Inventors:

Po-Hsuan Huang, Hsinchu, TW;

Tung-Lin Yang, Hsinchu, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F02B 77/04 (2006.01); F01N 3/02 (2006.01); B08B 7/02 (2006.01); B08B 9/027 (2006.01); F01N 13/08 (2010.01);
U.S. Cl.
CPC ...
F02B 77/04 (2013.01); B08B 7/02 (2013.01); B08B 9/027 (2013.01); F01N 3/02 (2013.01); F01N 13/08 (2013.01); F01N 2510/10 (2013.01); Y02T 10/12 (2013.01);
Abstract

A method of using an exhaust system includes activating an oscillating assembly connected to an exhaust line, wherein the oscillating assembly is configured to vibrate the exhaust line. The method further includes measuring a value indicating a flow of particles through the exhaust line. The method further includes comparing the value with a predetermined threshold value. The method further includes increasing a rate of vibration of the exhaust line in response to the value being below the predetermined threshold value.


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