The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 02, 2022
Filed:
Dec. 05, 2019
Disco Corporation, Tokyo, JP;
Yuki Inoue, Tokyo, JP;
DISCO CORPORATION, Tokyo, JP;
Abstract
A processing method for a disk-shaped workpiece includes a holding step of causing a holding table to hold a disk-shaped workpiece, a step of rotating the workpiece and a grinding wheel to grind the workpiece, a step of rotating the workpiece after ground and the polishing pad to polish the workpiece, a step of measuring, after polishing, a thickness of the workpiece at least at two measurement points of a first measurement point of a center of the workpiece and a second measurement point in a proximity of at an outer circumferential edge of the workpiece, a step of recognizing a thickness tendency in a diametrical direction of the workpiece from the measured thicknesses of the workpiece, and a step of changing an inclination relationship between a rotation shaft for rotating the grinding wheel and a rotation shaft of the table on the basis of the recognized thickness tendency.