The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 26, 2022
Filed:
Jul. 30, 2019
Applicant:
Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW;
Inventors:
Tsung-Sheng Kuo, Hsin-Chu, TW;
Kai-Chieh Huang, Hsin-Chu, TW;
Wei-Ting Hsiao, Taichung, TW;
Yang-Ann Chu, Hsin-Chu, TW;
I-Lun Yang, Hsin-Chu, TW;
Hsuan Lee, Tainan, TW;
Assignee:
Taiwan Semiconductor Manufacturing Co., Ltd., Hsin-Chu, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); H01L 21/677 (2006.01); B65G 47/90 (2006.01); H01L 21/673 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67745 (2013.01); B65G 47/90 (2013.01); H01L 21/67294 (2013.01); H01L 21/67333 (2013.01);
Abstract
Apparatus and methods for handling die carriers are disclosed. In one example, a disclosed apparatus includes: a load port configured to load a die carrier operable to hold a plurality of dies into a processing tool; and a lane changer coupled to the load port and configured to move at least one die in the die carrier to an input of the processing tool and transfer the at least one die into the processing tool for processing the at least one die.