The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 26, 2022

Filed:

Dec. 13, 2017
Applicant:

Entegris, Inc., Billerica, MA (US);

Inventors:

Mark Vincent Smith, Colorado Springs, CO (US);

Christopher Strickhouser, Monument, CO (US);

Assignee:

ENTEGRIS, INC., Billerica, MA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
E05C 9/06 (2006.01); E05C 9/10 (2006.01); H01L 21/673 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67373 (2013.01); E05C 9/06 (2013.01); E05C 9/10 (2013.01); H01L 21/67376 (2013.01); Y10T 292/084 (2015.04); Y10T 292/0806 (2015.04); Y10T 292/0834 (2015.04); Y10T 292/0837 (2015.04); Y10T 292/0839 (2015.04); Y10T 292/0964 (2015.04); Y10T 292/1015 (2015.04);
Abstract

A door of a substrate container includes a latching mechanism for operating at least two latch members. The substrate container can be a front opening substrate container or a bottom opening substrate container. The latching mechanism can include a rotatable cam having a first rotational profile out of phase with a second rotational profile such that when the cam is rotated to operate the latch mechanism from the disengaged position to the engaged position, a first latch member engages a first corresponding slot in a door frame prior to a second latch member engaging a second corresponding opening provided in the door frame such that the latch members are operated in a staggered manner. This staggered latching configuration allows for the application of a load provided by the system to be used in the most efficient manner per latch arm or per set of latch arms.


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