The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 19, 2022
Filed:
Nov. 22, 2019
Applicant:
University of Florida Research Foundation, Incorporated, Gainesville, FL (US);
Inventors:
Mayur Ghatge, Gainesville, FL (US);
Glen H. Walters, Gainesville, FL (US);
Toshikazu Nishida, Gainesville, FL (US);
Roozbeh Tabrizian, Gainesville, FL (US);
Assignee:
University of Florida Research Foundation, Incorporated, Gainesville, FL (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/187 (2006.01); H03H 9/02 (2006.01); H01L 41/053 (2006.01); H01L 41/316 (2013.01); H01L 41/047 (2006.01); H01L 41/08 (2006.01); H03H 3/02 (2006.01); H01L 27/20 (2006.01); H01L 41/29 (2013.01); H03H 9/13 (2006.01);
U.S. Cl.
CPC ...
H01L 41/187 (2013.01); H01L 27/20 (2013.01); H01L 41/0477 (2013.01); H01L 41/053 (2013.01); H01L 41/081 (2013.01); H01L 41/29 (2013.01); H01L 41/316 (2013.01); H03H 3/02 (2013.01); H03H 9/02031 (2013.01); H03H 9/13 (2013.01);
Abstract
A nano-mechanical acoustical resonator is designed and fabricated with CMOS compatible techniques to apply to mm-wave RF front-ends and 5G wireless communication systems which have extreme small scale and integrated in 3D sensors and actuators.