Multi-level substrate coating film-forming composition containing plasma-curable compound based on unsaturated bonds between carbon atoms

Abstract

There are provided a plasma-curable multi-level substrate coating film-forming composition for forming a coating film having planarity on a substrate, wherein the composition can fill a pattern sufficiently. A plasma-curable multi-level substrate coating film-forming composition comprising a compound (E) and a solvent (F), wherein the compound (E) has at least one partial structure selected from partial structures (I) of the following Formulae (1-1) to (1-7): wherein R, R, R, R, and Rare each independently a Calkylene group, a Carylene group (the alkylene group and the arylene group are optionally substituted with one or more amide or amino groups), an oxygen atom, a carbonyl group, a sulfur atom, —C(O)—NR—, —NR—, or a divalent group composed of any combination of these; Ris each independently a nitrogen atom, or a trivalent group composed of a combination of a nitrogen atom and at least one group selected from the group consisting of a Calkylene group, a Carylene group (the alkylene group and the arylene group are optionally substituted with one or more amide or amino groups), an oxygen atom, a carbonyl group, a sulfur atom, —C(O)—NR—, and —NR—; R, R, R, and Rare each independently a hydrogen atom, a Calkyl group, or a monovalent group composed of a combination of a hydrogen atom and at least one group selected from the group consisting of a Calkylene group, an oxygen atom, a carbonyl group, —C(O)—NR—, and —NR—; Ris a hydrogen atom or a Calkyl group; Ris a hydrogen atom, a Calkyl group, or a Calkylcarbonyl group; n is a number of repeating units of 1 to 10; and a dotted line is a chemical bond to the adjacent atom.