The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 12, 2022
Filed:
Feb. 03, 2021
Tokyo Electron Limited, Tokyo, JP;
Kazumi Yamagata, Yamanashi, JP;
Tatsuo Kawashima, Yamanashi, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A probe card holding device includes: a frame that holds a probe card by vacuum suction; a sealing member provided on the frame and configured to form an enclosed space by contacting the probe card; a placement section in which a first engaging portion provided at an outer circumference of the probe card is placed when the probe card is attached to the frame; a second engaging portion configured to be engaged with the first engaging portion; and an actuator configured to drive the second engaging portion between a first position and a second position. When the second engaging portion is engaged with the first engaging portion in response to dissipation of the vacuum suction, the probe card is held by the probe card holding device while the sealing member maintains a seal with the probe card.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile