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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11384253 B1

PDFFull Text
Date of Patent:
Jul. 12, 2022

Filed:

Dec. 30, 2019

Dual additive composition for polishing memory hard disks exhibiting edge roll off

Applicant:

Cabot Microelectronics Corporation, Aurora, IL (US);

Inventor:

Tong Li, Singapore, SG;

Assignee:

CMC Materials, Inc., Aurora, IL (US);

Attorneys:

Thomas Omholt

Erika R. Singleton

Primary Examiner:

Anita K Alanko

Int. Cl.
CPC ...
C09G 1/02 (2006.01); H01L 21/321 (2006.01); C09K 13/00 (2006.01); H01L 21/306 (2006.01); C23F 1/30 (2006.01); G11B 5/84 (2006.01); C23F 3/06 (2006.01);
U.S. Cl.
CPC ...
C09G 1/02 (2013.01); C09K 13/00 (2013.01); H01L 21/30625 (2013.01); H01L 21/3212 (2013.01); C23F 1/30 (2013.01); C23F 3/06 (2013.01); G11B 5/84 (2013.01);
Abstract

The invention provides a chemical-mechanical polishing composition comprising (a) an abrasive comprising colloidal silica, (b) a compound of formula (I), (c) a compound of formula (II), (d) hydrogen peroxide, and (e) water, wherein the polishing composition has a pH of about 1 to about 5. The invention also provides a method of chemically-mechanically polishing a substrate, especially a nickel-phosphorous substrate, by contacting the substrate with the inventive chemical-mechanical polishing composition.

Find Patent Forward Citations

Li, Tong. (2022). Dual additive composition for polishing memory hard disks exhibiting edge roll off (U.S. Patent No. 11384253). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11384253

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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