The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 05, 2022

Filed:

Jul. 08, 2020
Applicant:

Hitachi, Ltd., Tokyo, JP;

Inventors:

Hiroaki Kasai, Tokyo, JP;

Keiko Oka, Tokyo, JP;

Hisae Shibuya, Tokyo, JP;

Akio Yazaki, Tokyo, JP;

Assignee:

HITACHI, LTD., Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/00 (2006.01); G01N 21/88 (2006.01); G06T 7/00 (2017.01); G01N 21/95 (2006.01);
U.S. Cl.
CPC ...
G01N 21/8806 (2013.01); G06T 7/001 (2013.01); G01N 21/9501 (2013.01); G06T 2207/30148 (2013.01);
Abstract

An optical condition determination system includes a simulation execution unit that performs an optical simulation on a surface texture model that models a surface texture of a target object of the appearance inspection, and a defect model that models a defect of the target object, under a plurality of optical conditions to generate a surface texture image and a defect image, an image synthesizing unit that synthesizes the surface texture image and the defect image generated by an optical simulation under the same optical condition to generate a synthetic image, an evaluation value calculating unit that calculates an evaluation value representing easiness of detecting the defect in the synthetic image, a correlation analysis unit that analyzes a correlation between an optical condition and the evaluation value corresponding to the synthetic image, and an optimum condition searching unit that searches for the optical condition suitable for the appearance inspection based on an analysis result of the correlation.


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