The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 05, 2022
Filed:
Jan. 16, 2020
Applicant:
Seagate Technology Llc, Cupertino, CA (US);
Inventors:
Riyan Alex Mendonsa, Edina, MN (US);
Martin Giles Blaber, Minneapolis, MN (US);
Brett R. Herdendorf, Mound, MN (US);
Kevin A. Gomez, Eden Prairie, MN (US);
Assignee:
Seagate Technology LLC, Fremont, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/455 (2006.01); C23C 16/48 (2006.01); G11B 13/08 (2006.01); H01L 21/02 (2006.01); G11B 5/31 (2006.01); H01L 21/67 (2006.01); C23C 16/46 (2006.01);
U.S. Cl.
CPC ...
C23C 16/45544 (2013.01); C23C 16/46 (2013.01); C23C 16/483 (2013.01); G11B 5/3116 (2013.01); G11B 5/3133 (2013.01); G11B 13/08 (2013.01); H01L 21/0228 (2013.01); H01L 21/67109 (2013.01);
Abstract
A system includes a chamber, a support structure disposed in the chamber, and one or more heads. The support structure is configured to support and position a substrate. The one or more heads includes an energy source coupled to a near-field transducer for providing localized energy towards the support structure at select locations within the chamber.