The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 28, 2022
Filed:
Aug. 07, 2020
Kla Corporation, Milpitas, CA (US);
Mandar Paranjape, Cupertino, CA (US);
Steve Yifeng Cui, Fremont, CA (US);
Anatoly Romanovsky, Palo Alto, CA (US);
Million Daniel, Milpitas, CA (US);
Nadine Asenbaum-Doerre, Palo Alto, CA (US);
Jeff Chen, Cupertino, CA (US);
KLA Corporation, Milpitas, CA (US);
Abstract
A laser-beam power-modulation system includes an acousto-optic modulator (AOM) to receive a laser beam and separate the laser beam into a primary beam and a plurality of diffracted beams based on an input signal. The power of the primary beam depends on the input signal. The system also includes a slit to transmit the primary beam and dump the plurality of diffracted beams, a controller to generate a control signal based at least in part on feedback indicative of the power of the primary beam or the power of a beam generated using the primary beam, and a driver to generate the input signal based at least in part on the control signal.