The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 28, 2022
Filed:
Feb. 13, 2019
Asml Netherlands B.v., Veldhoven, NL;
Ivo Matteo Leonardus Weijden, Eindhoven, NL;
Jeroen Van Dongen, Houten, NL;
Cornelis Johannes Henricus Lambregts, Geldrop, NL;
Theo Wilhelmus Maria Thijssen, Eindhoven, NL;
Ruud Rudolphus Johannes Catharinus De Wit, Susteren, NL;
Hans Marinus Struijs, Eindhoven, NL;
Erik Mathijs Maria Crombag, Eindhoven, NL;
Roy Werkman, Eindhoven, NL;
Maria Helena Schut, Nuenen, NL;
Erwin Riemens, Eindhoven, NL;
Menno Meeldijk, Eindhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A method for determining a preferred control strategy relating to control of a manufacturing process for manufacturing an integrated circuit. The method includes: obtaining process data associated with a design of said integrated circuit; and obtaining a plurality of candidate control strategies configured to control the manufacturing process based on the process data, each candidate control strategy including an associated cost metric based on an associated requirement to implement the candidate control strategy. A quality metric related to an expected performance of the manufacturing process is determined for each candidate control strategies, and a preferred control strategy is selected based on the determined quality metrics and associated cost metrics for each candidate control strategy.