The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 28, 2022
Filed:
Nov. 18, 2019
Applicant:
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Inventors:
Assignee:
Carl Zeiss SMT GmbH, Oberkochen, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 7/182 (2021.01); G03F 7/20 (2006.01); G02B 7/18 (2021.01); G02B 5/08 (2006.01); G21K 1/06 (2006.01); C25D 7/08 (2006.01); G02B 5/18 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70266 (2013.01); C25D 7/08 (2013.01); G02B 5/0891 (2013.01); G02B 5/1847 (2013.01); G02B 7/1815 (2013.01); G21K 1/067 (2013.01); G21K 2201/065 (2013.01);
Abstract
The disclosure provides a method that includes filling a cavity in a substrate with a second material, wherein the substrate includes a first material. The method also includes using galvanic and/or chemical deposition of a third material to apply an overcoating to a first surface of the substrate in a region of the cavity. The method further includes removing the second material from the cavity. In addition, the method includes, before or after removing the second material from the cavity, applying a reflective layer to the overcoating. The disclosure also provides related optical articles and systems.