The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 28, 2022

Filed:

Oct. 14, 2019
Applicant:

Tokyo Ohka Kogyo Co., Ltd., Kawasaki, JP;

Inventors:

Masahito Yahagi, Kawasaki, JP;

Yoichi Hori, Kawasaki, JP;

Tatsuya Fujii, Kawasaki, JP;

Yuki Fukumura, Kawasaki, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/004 (2006.01); G03F 7/038 (2006.01); G03F 7/039 (2006.01); C08F 220/18 (2006.01); C08F 212/14 (2006.01); C08F 220/28 (2006.01); C08F 212/32 (2006.01); G03F 7/16 (2006.01); G03F 7/20 (2006.01); G03F 7/38 (2006.01); G03F 7/32 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0045 (2013.01); C08F 212/14 (2013.01); C08F 212/32 (2013.01); C08F 220/18 (2013.01); C08F 220/28 (2013.01); G03F 7/0382 (2013.01); G03F 7/0397 (2013.01); C08F 220/281 (2020.02); C08F 220/283 (2020.02); G03F 7/162 (2013.01); G03F 7/168 (2013.01); G03F 7/2004 (2013.01); G03F 7/322 (2013.01); G03F 7/38 (2013.01);
Abstract

A resist composition including a polymeric compound having a structural unit in which a compound represented by formula (a0-1) has a polymerizable group within the Wportion converted into a main chain, and a compound represented by formula (b1-1) in which Wrepresents a polymerizable group-containing group; Crepresents a tertiary carbon atom, and the α-position of Cis a carbon atom which constitutes a carbon-carbon unsaturated bond; Rrepresents an aromatic hydrocarbon group or a chain hydrocarbon group; Rand Rare mutually bonded to form a 5-membered aliphatic monocyclic group, or a condensed polycyclic hydrocarbon group containing a 5-membered aliphatic monocyclic ring; Rrepresents a cyclic group; R, Rand Reach independently represents a substituent; nrepresents an integer of 0 to 4; nrepresents an integer of 0 to 5; nrepresents an integer of 0 to 5; and Xrepresents a counteranion.


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