The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 28, 2022
Filed:
Jun. 04, 2020
Applicants:
Denso Corporation, Kariya, JP;
National University Corporation Kyoto Institute of Technology, Kyoto, JP;
Inventors:
Assignees:
DENSO CORPORATION, Kariya, JP;
NATIONAL UNIVERSITY CORPORATION KYOTO INSTITUTE OF TECHNOLOGY, Kyoto, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C30B 19/06 (2006.01); C30B 19/10 (2006.01); H01L 21/02 (2006.01); C30B 29/16 (2006.01);
U.S. Cl.
CPC ...
C30B 19/106 (2013.01); C30B 19/06 (2013.01); C30B 29/16 (2013.01); H01L 21/02565 (2013.01); H01L 21/02628 (2013.01);
Abstract
A method of forming an oxide film is provided. The method may include: supplying mist of a solution including a material of the oxide film dissolved therein to a surface of a substrate while heating the substrate at a first temperature so as to epitaxially grow the oxide film on the surface; and bringing the oxide film into contact with a fluid comprising oxygen atoms while heating the oxide film at a second temperature higher than the first temperature after the epitaxial growth of the oxide film.