The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 28, 2022

Filed:

Dec. 21, 2018
Applicant:

Texas Instruments Incorporated, Dallas, TX (US);

Inventors:

Luigi Colombo, Dallas, TX (US);

Nazila Dadvand, Richardson, TX (US);

Benjamin Stassen Cook, Addison, TX (US);

Archana Venugopal, Dallas, TX (US);

Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
C01B 21/064 (2006.01); C23C 16/34 (2006.01); C23C 18/32 (2006.01); C23C 18/16 (2006.01); C23C 18/36 (2006.01); C23C 18/28 (2006.01); C23C 18/30 (2006.01); C23C 18/20 (2006.01); G03F 1/60 (2012.01); G03F 1/20 (2012.01); C23C 18/38 (2006.01); C23C 18/42 (2006.01);
U.S. Cl.
CPC ...
C01B 21/0648 (2013.01); C23C 16/342 (2013.01); C23C 18/1641 (2013.01); C23C 18/1657 (2013.01); C23C 18/1689 (2013.01); C23C 18/2086 (2013.01); C23C 18/285 (2013.01); C23C 18/30 (2013.01); C23C 18/32 (2013.01); C23C 18/36 (2013.01); C01P 2004/22 (2013.01); C01P 2004/30 (2013.01); C23C 18/38 (2013.01); C23C 18/42 (2013.01); G03F 1/20 (2013.01); G03F 1/60 (2013.01);
Abstract

A microstructure comprises a plurality of interconnected units wherein the units are formed of hexagonal boron nitride (h-BN) tubes. The graphene tubes may be formed by photo-initiating the polymerization of a monomer in a pattern of interconnected units to form a polymer microlattice, removing unpolymerized monomer, coating the polymer microlattice with a metal, removing the polymer microlattice to leave a metal microlattice, depositing an h-BN precursor on the metal microlattice, converting the h-BN precursor to h-BN, and removing the metal microlattice.


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