The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 21, 2022
Filed:
Jan. 23, 2020
Applicant:
Ebara Corporation, Tokyo, JP;
Inventor:
Hideaki Tanaka, Tokyo, JP;
Assignee:
EBARA CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); A46B 17/06 (2006.01); B08B 5/04 (2006.01); H01L 21/02 (2006.01); B08B 1/04 (2006.01); A46B 13/00 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67046 (2013.01); A46B 17/06 (2013.01); B08B 5/04 (2013.01); H01L 21/02096 (2013.01); A46B 13/001 (2013.01); A46B 2200/30 (2013.01); B08B 1/04 (2013.01); H01L 21/67219 (2013.01);
Abstract
A cleaning apparatus for cleaning a cleaning tool that scrub-cleans a substrate includes a cleaning body. The cleaning body includes a contact portion configured to come into contact with the cleaning tool, and the contact portion includes a suction area configured to remove foreign matter from the cleaning tool.