The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 21, 2022
Filed:
Dec. 13, 2018
Mitutoyo Corporation, Kanagawa, JP;
Shinichiro Yanaka, Ibaraki, JP;
Masayuki Nara, Ibaraki, JP;
MITUTOYO CORPORATION, Kanagawa, JP;
Abstract
A method that corrects an error in positioning in a positioning mechanism by using a measurable length value measured by a laser interferometer and a measured value for spatial coordinates measured by the positioning mechanism. The method includes a measurement step in which a retroreflector affixed to a displacer is displaced to a plurality of measurement points, and the measured length value and the measured value at each of the measurement points is acquired; and a parameter calculation step in which a correction parameter is calculated based on the measured value, the measured length value, and the coordinates of a rotation center of the tracking-type laser interferometer. A first correction constant is applied to the measured length value for each measurement line, and a second correction constant different from the first correction constant is applied to the coordinates of the rotation center of the interferometer for each measurement line.