The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 21, 2022

Filed:

Dec. 13, 2018
Applicant:

Mitutoyo Corporation, Kanagawa, JP;

Inventors:

Shinichiro Yanaka, Ibaraki, JP;

Masayuki Nara, Ibaraki, JP;

Assignee:

MITUTOYO CORPORATION, Kanagawa, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G05B 19/401 (2006.01); G01B 9/02055 (2022.01); G01B 21/04 (2006.01);
U.S. Cl.
CPC ...
G05B 19/401 (2013.01); G01B 9/0207 (2013.01); G01B 9/02071 (2013.01); G01B 9/02072 (2013.04); G01B 21/045 (2013.01); G01B 2290/15 (2013.01); G05B 2219/37275 (2013.01); G05B 2219/39033 (2013.01); G05B 2219/41094 (2013.01); G05B 2219/50057 (2013.01);
Abstract

A spatial accuracy correction apparatus performs a spatial accuracy correction of a positioner displacing a displacer to a predetermined set of spatial coordinates using a measurable length value measured by an interferometer and a measurable value of the set of spatial coordinates of the displacement body that is measured by the positioner. The measured length value and the measured value for each measurement point are acquired by displacing the displacement body to a plurality of measurement points in order, one or more repeated measurements are conducted for at least one of the plurality of measurement points being measured after conducting measurement of the measured length value and the measured value for each of the plurality of measurement points, and the plurality of points are measured again when a repeat error of the measured length value is equal to or greater than a threshold value.


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