The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 21, 2022

Filed:

Oct. 12, 2018
Applicant:

Fibics Incorporated, Ottawa, CA;

Inventors:

Michael William Phaneuf, Ottawa, CA;

Ken Guillaume Lagarec, Ottawa, CA;

Andrew John Murray, Ottawa, CA;

Assignee:

FIBICS INCORPORATED, Ottawa, CA;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G01N 23/2255 (2018.01); G01N 1/28 (2006.01); H01J 37/20 (2006.01); G01N 23/2202 (2018.01);
U.S. Cl.
CPC ...
G01N 23/2255 (2013.01); G01N 1/28 (2013.01); G01N 1/286 (2013.01); G01N 1/2806 (2013.01); G01N 23/2202 (2013.01); H01J 37/20 (2013.01); G01N 2001/2873 (2013.01); G01N 2223/418 (2013.01); H01J 2237/006 (2013.01); H01J 2237/31745 (2013.01); H01J 2237/31749 (2013.01);
Abstract

A novel method for cross-section sample preparation has a sample oriented normal to an SEM/GFIS or other imaging column via a stage, and is operated upon by an FIB to form the cross-section pre-lamella within the sample, followed by an approximate 90° rotation with no tilt of the stage for cut out by the FIB. Asymmetric trenches are milled to have a three-dimensional depth profile to ensure that the FIB has clear line of sight to a face of the resulting pre-lamella when the sample has been rotated. The three-dimensional depth profile further minimizes overall milling time required for the preparation of the pre-lamella.


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