The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 14, 2022
Filed:
May. 21, 2018
Applicants:
Massachusetts Institute of Technology, Cambridge, MA (US);
Asml Netherlands Bv, AH Veldhoven, NL;
Inventors:
David L. Trumper, Plaistow, NH (US);
Lei Zhou, Cambridge, MA (US);
Ruvinda Gunawardana, Easton, CT (US);
Assignees:
Massachusetts Institute of Technology, Cambridge, MA (US);
ASML Netherlands B.V., AH Veldhoven, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/20 (2006.01); H02K 41/03 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70758 (2013.01); G03F 7/70741 (2013.01); H02K 41/033 (2013.01);
Abstract
A reticle transport system having a magnetically levitated transportation stage is disclosed. Such a system may be suitable for use in vacuum environments, for example, ultra-clean vacuum environments. A magnetic levitated linear motor functions to propel the transportation stage in a linear direction along a defined axis of travel and to magnetically levitate the transportation stage.