The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 14, 2022

Filed:

Aug. 11, 2020
Applicant:

Mitutoyo Corporation, Kanagawa, JP;

Inventor:

Masayuki Nara, Ibaraki, JP;

Assignee:

MITUTOYO CORPORATION, Kanagawa, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 11/00 (2006.01); G01N 21/17 (2006.01);
U.S. Cl.
CPC ...
G01B 11/002 (2013.01); G01N 21/17 (2013.01); G01N 2021/1785 (2013.01);
Abstract

An inspection method, correction method, and inspection device that include measuring a first spatial position where laser light is emitted at a first region and measuring a first strike position where the inspection device is struck by the laser light in the first region, the measurements being performed by emitting the laser light at the first region of the inspection device; measuring a second spatial position where the laser light is emitted at a second region and measuring a second strike position where the inspection device is struck by the laser light in the second region, the measurements being performed by emitting the laser light at the second region of the inspection device; and comparing measurement results for the first spatial position and the second spatial position with measurement results for the first strike position and the second strike position.


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