The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 14, 2022
Filed:
Nov. 26, 2018
Applicant:
Disco Corporation, Tokyo, JP;
Inventors:
Kazuyuki Hinohara, Tokyo, JP;
Ryohei Yamamoto, Tokyo, JP;
Assignee:
DISCO CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B28D 5/00 (2006.01); B23K 26/364 (2014.01); B23K 20/233 (2006.01); B23K 26/0622 (2014.01); B28D 5/04 (2006.01); B23K 26/00 (2014.01); B23K 26/08 (2014.01); B23K 20/10 (2006.01); B23K 26/53 (2014.01); B23K 26/70 (2014.01); B23K 103/00 (2006.01); B23K 101/40 (2006.01);
U.S. Cl.
CPC ...
B28D 5/0094 (2013.01); B23K 20/10 (2013.01); B23K 20/233 (2013.01); B23K 26/0006 (2013.01); B23K 26/0622 (2015.10); B23K 26/0823 (2013.01); B23K 26/0853 (2013.01); B23K 26/364 (2015.10); B23K 26/53 (2015.10); B23K 26/702 (2015.10); B28D 5/0011 (2013.01); B28D 5/0076 (2013.01); B28D 5/047 (2013.01); B23K 2101/40 (2018.08); B23K 2103/56 (2018.08);
Abstract
A peeling apparatus includes: an ingot holding unit holding an ingot with an ingot portion corresponding to a wafer being faced up; an ultrasonic wave oscillating unit which has an end face facing the ingot portion corresponding to the wafer and oscillates an ultrasonic wave; a water supplying unit supplying water to an area between the ingot portion corresponding to the wafer and the end face of the ultrasonic wave oscillating unit; and a peeling unit that holds the ingot portion corresponding to the wafer with suction and peels off the wafer from the ingot.