The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 07, 2022
Filed:
Jun. 30, 2020
Applicant:
Fei Company, Hillsboro, OR (US);
Inventors:
Brian Routh, Jr., Hillsboro, OR (US);
Brad Larson, Hillsboro, OR (US);
Aditee Shrotre, Mountain View, CA (US);
Oleg Sidorov, Hillsboro, OR (US);
Assignee:
FEI Company, Hillsboro, OR (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/30 (2006.01); H01J 37/31 (2006.01); G01N 23/2251 (2018.01);
U.S. Cl.
CPC ...
H01J 37/3005 (2013.01); G01N 23/2251 (2013.01); H01J 37/31 (2013.01); G01N 2223/07 (2013.01); G01N 2223/40 (2013.01); G01N 2223/507 (2013.01); H01J 2237/30466 (2013.01);
Abstract
Apparatuses and methods directed toward endpoint detection are disclosed herein. An example method at least includes forming a plurality of lines on a top surface of a sample; removing, a plurality of times, material from a working surface of the sample, the working surface different than the top surface; imaging, a plurality of times, the sample to at least capture the plurality of lines; and determining an endpoint based on a relative spatial characteristic between two or more lines of the plurality of lines.