The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 07, 2022

Filed:

Nov. 13, 2020
Applicant:

Fractilia, Llc, Austin, TX (US);

Inventor:

Chris Mack, Austin, TX (US);

Assignee:

Fractilia, LLC, Austin, TX (US);

Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 37/22 (2006.01); G06T 7/13 (2017.01); G06T 7/40 (2017.01); G06T 7/42 (2017.01); G06T 7/49 (2017.01); G06T 5/00 (2006.01); G01Q 30/02 (2010.01); G01Q 30/06 (2010.01); H01J 37/28 (2006.01);
U.S. Cl.
CPC ...
H01J 37/222 (2013.01); G01Q 30/02 (2013.01); G01Q 30/06 (2013.01); G06T 5/002 (2013.01); G06T 7/13 (2017.01); G06T 7/40 (2013.01); G06T 7/42 (2017.01); G06T 7/49 (2017.01); H01J 37/28 (2013.01); G06T 2207/10061 (2013.01); G06T 2207/30148 (2013.01); H01J 2237/2814 (2013.01); H01J 2237/2817 (2013.01);
Abstract

An edge detection system is disclosed. The edge detection system includes an imaging device configured for imaging a pattern structure to form a first image, wherein the pattern structure includes a predetermined feature, and the imaging device images the pattern structure to generate measured linescan information that includes image noise. The edge detection system includes a processor, coupled to the imaging device, configured to receive the measured linescan information including image noise from the imaging device, wherein the processor is configured to: apply the measured linescan information to an inverse linescan model that relates the measured linescan information to feature geometry information, determine, from the inverse linescan model, feature geometry information that describes feature edge positions of the predetermined feature corresponding to the measured linescan information, determine from the feature geometry information at least one metric that describes a property of the edge detection system.


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