The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 07, 2022
Filed:
Jan. 14, 2020
Sumitomo Chemical Company, Limited, Tokyo, JP;
SUMITOMO CHEMICAL COMPANY, LIMITED, Tokyo, JP;
Abstract
Disclosed is a resin including a structural unit represented by formula (a1-5) and a structural unit represented by formula (I), and a resist composition: wherein Rrepresents an alkyl group which may have a halogen atom, a hydrogen atom or a halogen atom; Zrepresents a single bond or *—(CH)—CO-L-; h3 represents an integer of 1 to 4; L, L, Land Leach independently represent —O— or —S—; s1 represents an integer of 1 to 3; s1' represents an integer of 0 to 3; Rrepresents a hydrogen atom or a methyl group; Arepresents a single bond or *—CO—O—; Rrepresents a halogen atom, a hydroxy group, a haloalkyl group or an alkyl group; mi represents an integer of 1 to 3; and ni represents an integer of 0 to 4, in which mi+ni≤5.