The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 07, 2022
Filed:
Jun. 24, 2020
Disco Corporation, Tokyo, JP;
Atsushi Ueki, Tokyo, JP;
Yutaka Kobayashi, Tokyo, JP;
DISCO CORPORATION, Tokyo, JP;
Abstract
A calculating section of a control unit calculates a vertical position Defocus for a condensing lens using a height value Hof a modified layer in a wafer that is set by a setting section according to the equation (1) below.Defocus=(thicknessof wafer−height value)/  () The calculating section calculates an appropriate vertical position for the condensing lens according to the equation (1) depending on the height value Hof the modified layer that is set by the setting section. Therefore, the vertical position of the condensing lens in laser processing operation can be determined more easily, and a time-consuming and tedious experiment for fine adjustment of the vertical position of the condensing lens does not need to be conducted.