The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 31, 2022
Filed:
Dec. 17, 2018
Applicant:
Cymer, Llc, San Diego, CA (US);
Inventors:
Edward Siqi Luo, San Diego, CA (US);
Richard Carl Ujazdowski, Ramona, CA (US);
Shuang Xu, San Diego, CA (US);
Assignee:
Cymer, LLC, San Diego, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01S 3/22 (2006.01); H01S 3/038 (2006.01); H01S 3/032 (2006.01); H01S 3/097 (2006.01); H01S 3/106 (2006.01); H01S 3/225 (2006.01); H01S 3/08 (2006.01);
U.S. Cl.
CPC ...
H01S 3/038 (2013.01); H01S 3/032 (2013.01); H01S 3/09705 (2013.01); H01S 3/1062 (2013.01); H01S 3/225 (2013.01); H01S 3/08004 (2013.01);
Abstract
Disclosed is a laser discharge chamber in which useful lifetime is extended by local electrical tuning using one or a combination of design of the chamber internal geometry, placement and distribution of components within the chamber such as electrodes, current returns, and capacitors, and selective electrical isolation of portions of the components.