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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11348810 B1

PDFFull Text
Date of Patent:
May. 31, 2022

Filed:

Oct. 13, 2017

Dry etching device and method for controlling same

Applicant:

Vault Creation Co., Ltd., Seoul, KR;

Inventors:

Sang Jun Choi, Seoul, KR;

Ji Sung Kang, Gimje-si, KR;

Assignee:

VAULT CREATION CO., LTD., Seoul, KR;

Attorney:

Kile Park Reed & Houtteman PLLC

Primary Examiner:

Ram N Kackar

Assistant Examiner:

Laureen Chan

Int. Cl.
CPC ...
H01L 21/67 (2006.01); H01J 37/32 (2006.01); H01L 21/027 (2006.01); H01L 21/3065 (2006.01); H01L 21/308 (2006.01); H01L 21/3213 (2006.01); H01L 21/683 (2006.01); H01L 21/321 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67069 (2013.01); H01J 37/32128 (2013.01); H01J 37/32568 (2013.01); H01J 37/32715 (2013.01); H01L 21/0273 (2013.01); H01L 21/3065 (2013.01); H01L 21/3081 (2013.01); H01L 21/3086 (2013.01); H01L 21/32136 (2013.01); H01L 21/32139 (2013.01); H01L 21/6831 (2013.01); H01J 2237/002 (2013.01); H01J 2237/24585 (2013.01); H01J 2237/3341 (2013.01); H01L 21/3212 (2013.01); H01L 21/67248 (2013.01);
Abstract

A dry etching device which can be used to etch products or used in processes regardless of materials and exhibits an excellent accuracy, and a method for controlling the same. The dry etching device includes: an anode part; a cathode part disposed at an upper side of the anode part and facing the anode part, receiving bi-directional voltage power in which polarity of a voltage alternates between a positive voltage and a negative voltage depending on time, and spaced apart from the anode part; a leveling part disposed in close contact with a surface of the cathode part facing the anode part, and for positioning a work-piece in a flat state; a holding part for holding the work-piece and the leveling part to the surface of the cathode part facing the anode part; and a bi-directional voltage power supplier for applying the bi-directional voltage power to the cathode part.

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