The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 31, 2022
Filed:
Feb. 05, 2019
Applicant:
Hitachi High-tech Corporation, Tokyo, JP;
Inventors:
Anoru Suga, Tokyo, JP;
Shuhei Yabu, Tokyo, JP;
Kazuki Ishizawa, Tokyo, JP;
Michio Hatano, Tokyo, JP;
Assignee:
Hitachi High-Tech Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/248 (2006.01); H01J 1/13 (2006.01); H01J 37/06 (2006.01); H01J 37/24 (2006.01);
U.S. Cl.
CPC ...
H01J 37/248 (2013.01); H01J 1/13 (2013.01); H01J 37/06 (2013.01); H01J 37/242 (2013.01);
Abstract
An objective of the present invention is to provide a charged particle beam device capable of estimating a lifetime of a filament of a charged particle beam source with a cheap and simple circuit configuration. The charged particle beam device according to the present invention includes a boosting circuit that boosts a voltage to be supplied to a filament and estimates a remaining duration of the filament using a measured value of a current flowing on a low-voltage side of the boosting circuit (see FIG.).