The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 31, 2022
Filed:
Apr. 25, 2019
Asml Netherlands B.v., Veldhoven, NL;
Markus Gerardus Martinus Maria Van Kraaij, Eindhoven, NL;
Maxim Pisarenco, Son en Breugel, NL;
Richard Quintanilha, Heidenheim an der Brenz, DE;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A method of calculating electromagnetic scattering properties of a structure represented as a nominal structure and a structural perturbation, has the steps:numerically solving a volume integral equation comprising a nominal linear systemto determine a nominal vector field being independent with respect to the structural perturbation;using a perturbed linear systemto determine an approximation of a vector field perturbation arising from the structural perturbation, by solving a volume integral equation or an adjoint linear system. Matrix-vector multiplication of a nominal linear system matrix convolution operator may be restricted to sub-matrices; andcalculating electromagnetic scattering properties of the structure using the determined nominal vector field and the determined approximation of the vector field perturbation.