The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 31, 2022
Filed:
Oct. 25, 2017
Applicant:
Toyo Gosei Co., Ltd., Chiba, JP;
Inventors:
Assignee:
TOYO GOSEI CO., LTD., Chiba, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/039 (2006.01); G03F 7/30 (2006.01); G03F 7/38 (2006.01); C07C 381/12 (2006.01); C07F 7/22 (2006.01); G03F 7/004 (2006.01); G03F 7/20 (2006.01); G03F 7/038 (2006.01); C07C 309/19 (2006.01); C07C 309/12 (2006.01); C07C 309/06 (2006.01);
U.S. Cl.
CPC ...
G03F 7/039 (2013.01); C07C 309/06 (2013.01); C07C 309/12 (2013.01); C07C 309/19 (2013.01); C07C 381/12 (2013.01); C07F 7/22 (2013.01); C07F 7/2208 (2013.01); G03F 7/004 (2013.01); G03F 7/0042 (2013.01); G03F 7/0045 (2013.01); G03F 7/038 (2013.01); G03F 7/20 (2013.01); G03F 7/30 (2013.01); C07C 2602/42 (2017.05); C07C 2603/74 (2017.05); G03F 7/38 (2013.01); Y02P 20/55 (2015.11);
Abstract
A metal-containing onium salt compound suitable for use as a photodegradable base of a resist composition and a resist composition using the metal-containing onium salt compound are provided, the resist composition having excellent sensitivity to ionizing radiation such as extreme ultraviolet (EUV), excellent resolution and focal depth in lithography, and can reduce line width roughness (LWR) in a fine pattern. The onium salt compound including a specific metal is used as the photodegradable base.