The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 31, 2022

Filed:

Oct. 29, 2020
Applicant:

Carl Zeiss Microscopy Gmbh, Jena, DE;

Inventors:

Andreas Schmaunz, Oberkochen, DE;

Gero Walter, Westhausen, DE;

Stephan Hiller, Koenigsbronn, DE;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 21/26 (2006.01); G02B 21/08 (2006.01); G02B 21/28 (2006.01); G02B 21/30 (2006.01); H01J 37/20 (2006.01); H01J 37/244 (2006.01); H01J 37/28 (2006.01);
U.S. Cl.
CPC ...
G02B 21/26 (2013.01); G02B 21/08 (2013.01); G02B 21/28 (2013.01); G02B 21/30 (2013.01); H01J 37/20 (2013.01); H01J 37/244 (2013.01); H01J 37/28 (2013.01); H01J 2237/2001 (2013.01); H01J 2237/202 (2013.01);
Abstract

A particle beam apparatus and/or a light microscope is operated. A first temperature of an object may be changed, where the object may be arranged on an object receiving device rendered movable by a motor operated by a supply current. Changing the first temperature of the object may alter a second temperature of the object-receiving device from a first temperature value to a second temperature value. The supply current of the motor may be changed from a first current value to a second current value, where the supply current is designed to hold the object-receiving device in position, and a temperature of the object-receiving device may be changed from the second temperature value to a third temperature value on account of heat generated by the motor, which may be obtained by the second current value of the supply current and fed to the object receiving device.


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