The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 31, 2022

Filed:

Jul. 13, 2020
Applicant:

Ebara Corporation, Tokyo, JP;

Inventors:

Haruka Takeuchi, Tokyo, JP;

Tomonori Ohashi, Tokyo, JP;

Ichiju Sato, Tokyo, JP;

Assignee:

EBARA CORPORATION, Tokyo, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R 33/02 (2006.01); G01R 33/022 (2006.01); G01R 33/028 (2006.01);
U.S. Cl.
CPC ...
G01R 33/022 (2013.01); G01R 33/0283 (2013.01);
Abstract

A target value of magnetic flux density and magnetic flux density actually obtained are made to coincide precisely with each other. An electromagnet control device comprises a current value determining unit for determining, based on a magnetic flux density instruction value, a value of current that is made to flow through a coil. The current value determining unit is constructed to execute a second process for determining, based on a second function, a value of the current, if the magnetic flux density is to be decreased from that in a first magnetization state, and a fourth process for expanding or reducing the second function by use of a first scaling ratio for transforming it to a fourth function, and determining, based on the fourth function obtained after above transformation, a value of the current, if the magnetic flux density is to be decreased from that in a third magnetization state.


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